Low Pressure Manual Diaphragm Valves

Low Pressure Diaphragm Valves offer low internal volume, minimal particle generation, and no dead space for easy flow path sweeping. A contained seat resists swelling and contamination.  A cobalt alloy diaphragm ensures long cycle life with high strength and corrosion resistance. Metal-to-metal seating prevents external leakage. A handle with a window allows for easy open/close identification. Various connection types, sizes, and seat materials are available. Wetted surfaces are electropolished to Ra 5 μin. (0.13 μm), making these valves suitable for high purity and ultra high purity applications.

Product Details

  • Product Name:Low Pressure Manual Diaphragm Valves
  • Materialof the Valve body: 316L,CF3M
  • Inlet Size:3/4”,1”,3/8”23×5 mm ,25 mm or 25 ×1.5 mm
  • Variousend connection Types:Fractional Tube Butt Weld,Metric Tube Butt Weld,Fractional Tube Butt Weld,Metric Tube Butt Weld,Integral Male VCR Metal Gasket Face Seal Fitting
  • Working Pressure: 300 psig (20.7 bar)
  • Pneumatic Actuator Pressure: 80 to 95 psig (5.5 to 6.5 bar)
  • Temperature:PCTFE: -10 ~ 150 °F (-23 ~ 65 °C) Polyimide: -10 ~ 250 °F (-23 ~ 121 °C)

 

Features

  • No dead space in the flow path
  • No internally wetted threads or springs which minimizes particle
  • generation and particle entrapment for high purity.
  • PCTFE stem tip insert for leak-tight shutoff

 

Application:

High-flow system endpoints or exhaust ends:

Main process exhaust line valves for large-scale etchers and PVD/CVD equipment.

Roughing line isolation valves for central vacuum systems.

Outlet or bypass valves for bulk gas storage tanks (e.g., GN₂, CDA).

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