Two-Step Pneumatic Diaphragm Valves

Product Details

• Product Name:Two-Step Pneumatic Diaphragm Valves
• Materialof the Valve body: 316L,316L VAR
• Inlet Size:1/4″
• Variousend connection Types:Integral Male VCR Metal Gasket Face Seal Fitting，Rotatable Female VCR Metal Gasket Face Seal Fitting，Rotatable Male VCR Metal Gasket Face Seal Fitting
• Working Pressure:Vacuum to 145 psig (10 bar）
• Pneumatic Actuator Pressure: 60 to 90 psig (4.2 to 6.2 bar）
• Temperature:PFA: 14 ~ 302 °F (-10 ~ 150 °C) PCTFE: 14 ~ 176 °F (-10 ~ 80 °C

Features

• Fast switching between low and high flow rates
• Minimal particle generation and minimal dead space
• Cobalt alloy diaphragm with high strength and corrosion resistance to ensure long cycle life
• No internally wetted threads or springs which minimizes particle generation and particle entrapment for high purity
• Valve Cv values in low-flow mode can be preset at the factory according to customer specifications or adjusted by customers themselves

Application:

To prevent high-velocity gas from impacting sensitive chambers or samples:

When filling a vacuum loadlock with nitrogen or dry air.

During the pressure balancing process of a wafer transfer chamber.

As the sample inlet valve of analytical instruments to avoid sample dispersion.