Coaxial tubing

Product Details

• Product Name:Coaxial Tubing and Fittings
• Type:Tubing,Sleeve,Terminator,90° Elbow,45° Elbow,Equal Tee,Reducing Tee
• Material:

Iner tube:316L,316L VAR,316L VIM-VAR

Outer tube: 316L, 304L

• Outside diameters:

Inner tube: 1/4″ ~ 2″

Outer tube: 1/2″ ~ 2 1/2″

Process: roughness of 15 in (0.38 m),Ra≤20 µin (0.51 µm), Ra≤32 µin (0.8 µm), Ra≤63 µin (1.6 µm); external surface mechine finished to roughness of Ra ≤63 µin

(1.6 µm)

 

 

• Features:
• Cleaning: ultrasonically cleaned and rinsed, then washed, and purged and dried with UHP hot nitrogen in ISO 4 cleanroom
• Packaging: assembled in ISO 4 cleanroom, tubing ends are capped and tubing is packed in double polyethylene bags withinner bag filled with 99.99999% nitrogen

 

Marked with brand, inner tube grade, inner tube specification, inner tube heat number, outer tube grade, outer tube

Connection Method

 

Coaxial Seal Fittings

 

Coaxial Seal Fittings feature a double ferrule design that significantly reduces installation costs when using coaxial tubing in semiconductor manufacturing, as well as in toxic or hazardous gas applications. Unlike traditional welding methods used to seal the outer tube, these fittings eliminate the challenges, time consumption, and high costs associated with welding. They also mitigate the risk of damaging the inner tubes during the welding process. They are easy to install, highly reliable, and safe. Additionally, gap gauges can be used to verify proper end connection assembly before system pressurization.

.Product Details

 

• Product Name:Coaxial Seal Fittings
• Type:Bulkhead Bored-Through Reducing Unions,Bulkhead Bored-Through Reducing Tees,
• Material:316SS,304SS
• Sizes rangefrom 1/2″ to 1″ or 12 mm to 25 mm
• End Connection Type:Fractional Tube Fitting,Metric Tube Fitting

 

Process: roughness of 15 in (0.38 m),Ra≤20 µin (0.51 µm), Ra≤32 µin (0.8 µm), Ra≤63 µin (1.6 µm); external surface mechine finished to roughness of Ra ≤63 µin

(1.6 µm)

 

 

Features:

• Same installation method as Two ferrules Tube Fittings
• Available with metal and non-metal ferrules
• The working pressure of metal coaxial tube fittings is determined by multiplying the outer tube’s working pressure by corresponding coefficients
• Cleaning: ultrasonically cleaned and rinsed, then washed, and purged and dried with UHP hot nitrogen in ISO 4 cleanroom
• Packaging: assembled in ISO 4 cleanroom, tubing ends are capped and tubing is packed in double polyethylene bags withinner bag filled with 99.99999% nitrogen

Application

1. Semiconductor Manufacturing (Core Application)

Photoresist Temperature Control Systems: Prior to coating and development processes, photoresist must be maintained at a precise constant temperature, typically within ±0.1°C. Coaxial tubing provides extremely stable and uniform temperature control for the photoresist flowing through the inner tube via a circulating heat transfer medium in the outer annulus. This is critical for ensuring linewidth accuracy.

CMP Slurry Delivery: Chemical Mechanical Planarization slurry requires constant temperature to prevent settling and ensure stable reaction rates. Coaxial tubing systems enable precise temperature management for these slurries.

Ultra-High-Purity Chemical Delivery: When transferring temperature-sensitive etchants, cleansers, or other high-purity chemicals, coaxial tubing allows for heating or cooling while guaranteeing the absolute purity of the chemical within the inner tube.

 

2. High-Performance Plastics & Chemical Industries

Melt Transfer & Temperature Maintenance: During the transfer of high-temperature, high-viscosity polymer melts (e.g., PE, PP, PET), a circulating heat transfer medium in the outer annulus precisely maintains the melt temperature in the inner tube. This prevents cooling, crystallization, or viscosity changes, ensuring product quality and extrusion stability.

Reactor Feed Systems: Provides precise pre-heating control for monomers or catalysts that require heating before being fed into chemical reactors.

 

3. Food & Pharmaceutical Industries

Sterile Product Temperature Maintenance/Cooling: On aseptic filling lines, coaxial tubing can precisely maintain the temperature of temperature-sensitive products (e.g., high-end nutritional liquids, biologics) during transfer.

CIP/SIP System Connections: Serves as fixed connection points in piping that require simultaneous product transfer and jacketed heating/cooling, ensuring hygiene and sterility requirements are met.

 

4. Analytical & Laboratory Equipment

Analytical Instrument Sample Lines: Used in instruments like Gas Chromatographs (GC) to precisely pre-heat sample gases entering the column or to provide trace heating for transfer lines to prevent condensation of high-boiling-point components.

High-Temperature & High-Pressure Reaction Experiments: Enables precise temperature control for materials entering or exiting small-scale laboratory reactors.

 

5. Energy & Industrial Heating

Solar Thermal Systems: Used to transfer high-temperature heat transfer fluids (e.g., thermal oil, molten salts). The dual-concentric structure helps minimize heat loss and improve system efficiency.

Mold Temperature Control: Provides precise, efficient heating and cooling channels for core components of molds in injection molding or die-casting processes.