Product Details
- Product Name:High Purity Piping
- Material:316L,316L VAR,316L VIM-VAR
- Standards: JIS G3459/ASTM A312
- Process: internal surface electropolished to roughness of Ra≤15 μin (0.38 μm),
Ra≤10 μin (0.25 μm), Ra≤7 μin (0.18 μm), Ra≤5 μin (0.13 μm); external surface roughness of Ra≤40 μin (1 μm)
- Wall thickness:1.0,1.2,1.65,2.1,2.8
- Size:Size range from NPS 1/8-NPS 2
- Features:
- All Pipings are Inspectied through visual inspection, surface roughness measurement, particle test,dew point testing, oil content testing, scanning electron microscopy (SEM),Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (ESCA or XPS)
- All pipes are seamless
- Cleaning: ultrasonically cleaned and rinsed, then washed, and purged and dried with UHP hot nitrogen in ISO 4 cleanroom
- Packaging: packaged in ISO 4 cleanroom, cleaned with ultra high pressure nitrogen, tubing ends are fitted with anti-static
- film and caps and tubing is packed in double polyethylene bags with inner bag filled with 99.99999% nitrogen
- Marking:tubing bodies are marked with brand, material grade, specification and heat number
- Standard length: 20 ft, 2 m, 3 m, 4 m and 6 m
Working Pressure at Ambient Temperature
For seamless pipes, working pressures are calculated in accordance with ASME B31.3: for single butt weld pipes, multiply the pressure rating by 0.8.
Application
Semiconductor Manufacturing
- Photolithography Process: Main pipeline delivery of high-purity developers and etchants
- Wafer Cleaning: Ultra-pure water (UPW) distribution system ensuring 18.2 MΩ·cm water quality
- CMP Process: Delivery pipelines for polishing slurries to prevent metal ion contamination
- Special Gas Systems: High-purity process gas delivery for etching, CVD, and other processes
Biopharmaceuticals
- Bioreactors: Clean delivery of cell culture media and buffers
- Purification Systems: Distribution pipelines for chromatographic column feed and elution solutions
- Water for Injection (WFI): WFI system pipelines meeting pharmacopoeial sterility requirements
- Product Filling: Final product transfer of monoclonal antibodies, vaccines, and other biologics
New Energy and Precision Chemical Industry
- Photovoltaic Industry: Delivery of high-purity chemicals in silicon wafer processing
- Lithium Battery Materials: Slurry delivery for cathode and anode material preparation
- Advanced Displays: OLED material delivery systems to prevent particle contamination
Laboratory and R&D
- Analytical Instruments: Sample flow paths for precision instruments like HPLC and ICP-MS
- Pilot Platforms: Fluid system construction for process scale-up
- Clean Laboratories: Fluid supply pipelines for ultra-clean workstations
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