Atomic Layer Deposition Diaphragm Valves

Product Details

• Product Name:Atomic Layer Deposition Diaphragm Valves
• Materialof the Valve body: 316L，316L VAR，316LSS VIM-VAR
• Inlet Size:1/4”,1/2”，3/8”,1.125”,1.5”,1.5” High Flow 6mm,8mm,10mm,12mm
• Variousend connection Types:Fractional Tube Butt Weld,Metric Tube Butt Weld,Integral Male VCR Metal Gasket Face Seal Fitting,Rotatable Female VCR Metal Gasket Face Seal Fitting,Rotatable Male VCR Metal Gasket Face Seal Fitting,High Flow Rotatable Female VCR Metal Gasket Face Seal Fitting,High Flow Rotatable Male VCR Metal Gasket Face Seal Fitting,W-Seal,C-Seal

Features

• Ultra long cycle life
• No dead space in the flow path
• High Cv consistency and stability
• Quick response to offer a total opening / closing response time of less than 15 ms
• For the valve fitted with a solenoid valve, the solenoid valve is circularly rotatable along the actuator for easy position adjustment
• Standard, thermal and thermal immersion models optional

Application:

Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE) in semiconductor front-end manufacturing.

ALD thin-film deposition equipment, Metal-Organic Chemical Vapor Deposition (MOCVD) reaction chambers.

Application Points:

Outlet isolation valves for precursor canisters.

Precise switching valves for gas inlet and exhaust in reaction chambers.

Rapid-pulse valves for purge gas lines.