Product Details
- Product Name:Low Pressure Manual Diaphragm Valves
- Materialof the Valve body: 316L,CF3M
- Inlet Size:3/4”,1”,3/8”23×5 mm ,25 mm or 25 ×1.5 mm
- Variousend connection Types:Fractional Tube Butt Weld,Metric Tube Butt Weld,Fractional Tube Butt Weld,Metric Tube Butt Weld,Integral Male VCR Metal Gasket Face Seal Fitting
- Working Pressure: 300 psig (20.7 bar)
- Pneumatic Actuator Pressure: 80 to 95 psig (5.5 to 6.5 bar)
- Temperature:PCTFE: -10 ~ 150 °F (-23 ~ 65 °C) Polyimide: -10 ~ 250 °F (-23 ~ 121 °C)
Features
- No dead space in the flow path
- No internally wetted threads or springs which minimizes particle
- generation and particle entrapment for high purity.
- PCTFE stem tip insert for leak-tight shutoff
Application:
High-flow system endpoints or exhaust ends:
Main process exhaust line valves for large-scale etchers and PVD/CVD equipment.
Roughing line isolation valves for central vacuum systems.
Outlet or bypass valves for bulk gas storage tanks (e.g., GN₂, CDA).




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