Ultra High Purity Filters

Ultra High Purity Filters feature a removal rating of 0.003 µm. Designed with a PTFE filter element, these filters offer excellent chemical compatibility, making them ideal for filtering gases in various semiconductor manufacturing processes such as CVD, PVD, and dry etching.

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Product Details

  • Product Name:Ultra High Purity Filters
  • Material:316L SS, 316L SS VAR
  • Wetted Surface Roughness:Ra 5μin. (0.13μm)
  • Polishing Process:Electropolished
  • Assembly Environment:ISO Class 4 (FS 209E Class 10 equivalent) cleanroom
  • Packaging:Double bagged in cleanroom
  • Filter Elements:PTFE or PFA

 

Features:

  • Particle removal rating of≥0.003 µm, with a filter efficiency greater than 99.9999999% at maximum flow rate
  • Excellent chemical compatibility
  • 100% helium leak tested

 

Technical Data:

 

Applications & Importance

 

  1. Semiconductor & Integrated Circuit Manufacturing

 

Application: Filtration of Ultra-Pure Water (UPW), high-purity chemicals (e.g., photoresists, etchants, CMP slurries), and ultra-high-purity process gases.

Critical Importance: A single particle a thousand times smaller than a human hair can cause short circuits or defects in microchip circuits. Ultra-High Purity (UHP) filters are the lifeline for ensuring chip yield and performance.

 

  1. Pharmaceutical & Biotechnology

 

Applications:

Sterilizing Filtration: Critical final step of sterilizing drug solutions via 0.22 μm or 0.1 μm filtration prior to filling, ensuring product sterility.

Virus Removal Filtration: Use of specific pore-size filters to remove or reduce viral load in the production of biologics (e.g., monoclonal antibodies, vaccines).

Process Gas/Water Filtration: Providing sterile air and Water for Injection (WFI) to fermenters and purification chromatography systems.

Critical Importance: Directly impacts drug safety, efficacy, and regulatory compliance, requiring adherence to strict GMP and pharmacopeial standards.

 

  1. Flat Panel Display Manufacturing

Application: Similar to the semiconductor industry, used to filter liquid crystal materials, cleaning agents, and photolithography materials to prevent bright spots, dark spots, and other defects on display panels.

 

  1. Life Sciences & Laboratory Research

Application: Providing ultra-pure solvents and water for cell culture, chromatographic analysis, mass spectrometry, etc., ensuring the accuracy and reproducibility of experimental data.

 

  1. High-End Food & Beverage Production

Application: Used for cold sterilization filtration (an alternative to thermal pasteurization) in the production of premium beer, bottled water, and concentrated fruit juices to preserve flavor and nutritional quality.

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